JPH0314775Y2 - - Google Patents

Info

Publication number
JPH0314775Y2
JPH0314775Y2 JP1985019237U JP1923785U JPH0314775Y2 JP H0314775 Y2 JPH0314775 Y2 JP H0314775Y2 JP 1985019237 U JP1985019237 U JP 1985019237U JP 1923785 U JP1923785 U JP 1923785U JP H0314775 Y2 JPH0314775 Y2 JP H0314775Y2
Authority
JP
Japan
Prior art keywords
sample
ion
irradiating
chamber
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985019237U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61135460U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985019237U priority Critical patent/JPH0314775Y2/ja
Publication of JPS61135460U publication Critical patent/JPS61135460U/ja
Application granted granted Critical
Publication of JPH0314775Y2 publication Critical patent/JPH0314775Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1985019237U 1985-02-14 1985-02-14 Expired JPH0314775Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985019237U JPH0314775Y2 (en]) 1985-02-14 1985-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985019237U JPH0314775Y2 (en]) 1985-02-14 1985-02-14

Publications (2)

Publication Number Publication Date
JPS61135460U JPS61135460U (en]) 1986-08-23
JPH0314775Y2 true JPH0314775Y2 (en]) 1991-04-02

Family

ID=30508626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985019237U Expired JPH0314775Y2 (en]) 1985-02-14 1985-02-14

Country Status (1)

Country Link
JP (1) JPH0314775Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0539561Y2 (en]) * 1986-07-08 1993-10-07
JP2581695B2 (ja) * 1987-07-15 1997-02-12 株式会社島津製作所 イオンエッチング装置
JP5213479B2 (ja) * 2008-02-28 2013-06-19 矢崎総業株式会社 シール検査方法、及びシール検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327484A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Ion microanalyzer
JPS55130053A (en) * 1979-03-30 1980-10-08 Jeol Ltd Sampler in scanning electron microscope

Also Published As

Publication number Publication date
JPS61135460U (en]) 1986-08-23

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